Synthesis of titanium nitride thin films deposited by a new...

Applied Surface Science 2011 Vol. 257; Iss. 13

Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

Yanhui Zhao, Guoqiang Lin, Jinquan Xiao, Wenchang Lang, Chuang Dong, Jun Gong, Chao Sun
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Volume:
257
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2011.01.075
File:
PDF, 450 KB
english, 2011
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