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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Stable DRIE-patterned SiO2/Si3N4 electrets
Boisseau, S., Chaillout, J. J., Danel, J. S., Legras, J. B., Despesse, G.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6627174
File:
PDF, 1.28 MB
english, 2013