The influence of substrate etched on the quality of GaN...

The influence of substrate etched on the quality of GaN epilayers

Junping Mei, Xinjian Xie, Qiuyan Hao, Weina Jing, Caichi Liu
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Volume:
257
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2011.03.093
File:
PDF, 654 KB
english, 2011
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