Effect of structure variation on thermal conductivity of...

Effect of structure variation on thermal conductivity of hydrogenated silicon film

Shibin Li, Yadong Jiang, Zhiming Wu, Jiang Wu, Zhihua Ying, Zhiming Wang, Wei Li, Gregory J. Salamo
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Volume:
257
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2011.03.107
File:
PDF, 319 KB
english, 2011
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