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Effect of structure variation on thermal conductivity of hydrogenated silicon film
Shibin Li, Yadong Jiang, Zhiming Wu, Jiang Wu, Zhihua Ying, Zhiming Wang, Wei Li, Gregory J. SalamoVolume:
257
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2011.03.107
File:
PDF, 319 KB
english, 2011