Effects of magnesium film thickness and annealing...

Applied Surface Science 2011 Vol. 257; Iss. 17

Effects of magnesium film thickness and annealing temperature on formation of Mg2Si films on silicon (1 1 1) substrate deposited by magnetron sputtering

Qingquan Xiao, Quan Xie, Xiangqian Shen, Jinmin Zhang, Zhiqiang Yu, Kejie Zhao
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Volume:
257
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2011.04.032
File:
PDF, 1.03 MB
english, 2011
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