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[IEEE 2008 8th IEEE Conference on Nanotechnology (NANO) - Arlington, Texas, USA (2008.08.18-2008.08.21)] 2008 8th IEEE Conference on Nanotechnology - Interdigitated Array Electrodes with Nano Gaps Using Optical Lithography and Controlled Undercut Method
Shim, Joon S., Rust, Michael J., Ahn, Chong H.Year:
2008
Language:
english
DOI:
10.1109/nano.2008.254
File:
PDF, 511 KB
english, 2008