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Influence of adhesion of silica and ceria abrasive nanoparticles on Chemical–Mechanical Planarization of silica surfaces
D.O. Volkov, P.R Veera Dandu, H. Goodman, B. Santora, I. SokolovVolume:
257
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2011.04.142
File:
PDF, 1.35 MB
english, 2011