Influence of adhesion of silica and ceria abrasive...

Influence of adhesion of silica and ceria abrasive nanoparticles on Chemical–Mechanical Planarization of silica surfaces

D.O. Volkov, P.R Veera Dandu, H. Goodman, B. Santora, I. Sokolov
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
257
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2011.04.142
File:
PDF, 1.35 MB
english, 2011
Conversion to is in progress
Conversion to is failed