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Resonance of electrostatically actuated thin-film amorphous silicon microelectromechanical systems microresonators in aqueous solutions: Effect of solution conductivity and viscosity
T. Adrega, V. Chu, J. P. CondeYear:
2007
Language:
english
DOI:
10.1063/1.2728769
File:
PDF, 744 KB
english, 2007