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Morphology of platinum silicide films prepared by conventional and rapid thermal annealing and deep levels induced in silicon
C. A. Dimitriadis, E. K. Polychroniadis, E. K. Evangelou, G. E. GiakoumakisYear:
1991
Language:
english
DOI:
10.1063/1.349289
File:
PDF, 1.03 MB
english, 1991