Microstructure and dielectric properties of piezoelectric...

Journal of Applied Physics 2012 Vol. 111; Iss. 9

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

Zukauskaite, Agne, Wingqvist, Gunilla, Palisaitis, Justinas, Jensen, Jens, Persson, Per O. Å., Matloub, Ramin, Muralt, Paul, Kim, Yunseok, Birch, Jens, Hultman, Lars
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Volume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4714220
File:
PDF, 1.79 MB
english, 2012
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