[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bilayer wire-grid polarizers for DUV to IR fabricated using EUV interference and nanoimprint lithography
Wang, Li, Schift, Helmut, Kristiansen, Per Magnus, Jefimovs, Konstantins, Solak, Harun H., Gobrecht, Jens, Ekinci, YasinYear:
2013
Language:
english
DOI:
10.1109/nems.2013.6559941
File:
PDF, 562 KB
english, 2013