The pressure dependence of the deposition rate in a...

Thin Solid Films 2015 / 01 Vol. 574

The pressure dependence of the deposition rate in a magnetron sputtering system

Sheikin, E.G.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
574
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.11.043
Date:
January, 2015
File:
PDF, 956 KB
english, 2015
Conversion to is in progress
Conversion to is failed