[IEEE IEEE International Solid-State Sensors and Actuators...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics

Brosnihan, T.J., Brown, S.A., Brogan, A., Gormley, C.S., Collins, D.J., Sherman, S.J., Lemkin, M., Polce, N.A., Davis, M.S.

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/sensor.2003.1217096

File:

PDF, 537 KB

english, 2003

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