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Miniature active damping stage for scanning probe applications in ultra high vacuum
M. Assig, A. Koch, W. Stiepany, C. Straßer, A. Ast, K. Kern, C. R. AstYear:
2012
Language:
english
DOI:
10.1063/1.3689769
File:
PDF, 1.14 MB
english, 2012