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Surface plasma source to generate high-brightness H− beams for ion projection lithography (abstract)a)
V. G. Dudnikov, G. E. Derevyankin, D. V. Kovalevsky, V. Y. Savkin, E. A. Sokolovsky, S. K. GuharayYear:
1996
Language:
english
DOI:
10.1063/1.1147227
File:
PDF, 290 KB
english, 1996