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TOF SIMS analyses of stray Ga during FIB milling
Santeufemio, Christopher, Gorman, Brian P., Zhou, Chuanzhen, Giannuzzi, Lucille A., Stevie, Fred A.Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4825403
File:
PDF, 1.03 MB
english, 2013