Formation of nanovoids in high-dose hydrogen implanted GaN

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Formation of nanovoids in high-dose hydrogen implanted GaN

I. Radu, R. Singh, R. Scholz, U. Gösele, S. Christiansen, G. Brüderl, C. Eichler, V. Härle
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Year:
2006
Language:
english
DOI:
10.1063/1.2221526
File:
PDF, 484 KB
english, 2006
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