Cyclic thermal annealing on Ge/Si(100) epitaxial films...

Thin Solid Films 2015 / 01 Vol. 574

Cyclic thermal annealing on Ge/Si(100) epitaxial films grown by magnetron sputtering

Liu, Ziheng, Hao, Xiaojing, Ho-Baillie, Anita, Tsao, Chao-yang, Green, Martin A.
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Volume:
574
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.11.083
Date:
January, 2015
File:
PDF, 980 KB
english, 2015
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