Differential Surface-Charge-Induced Damage of Dielectrics and Leakage Kinetics during Plasma Processing
Abatchev, M. K., Murali, S. KrupakarVolume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2130311
File:
PDF, 450 KB
english, 2006