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Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source
F. Barkusky, C. Peth, A. Bayer, K. MannYear:
2007
Language:
english
DOI:
10.1063/1.2749210
File:
PDF, 871 KB
english, 2007