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Electrical properties of as-grown molecular beam epitaxy high-k gate dielectrics deposited on silicon
A. Goldenblum, I. Pintilie, M. Buda, A. Popa, M. Lisca, T. Botila, V. Teodorescu, A. Dimoulas, G. VellianitisYear:
2006
Language:
english
DOI:
10.1063/1.2180428
File:
PDF, 1.30 MB
english, 2006