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Algorithms for numerical simulation of radio-frequency glow discharges
Paranjpe, Ajit P., McVittie, James P., Self, Sidney A.Volume:
41
Language:
english
Journal:
Physical Review A
DOI:
10.1103/PhysRevA.41.6949
Date:
June, 1990
File:
PDF, 709 KB
english, 1990