Effect of N[sub 2] annealing on AlZrO oxide

J. Pétry, O. Richard, W. Vandervorst, T. Conard, J. Chen, V. Cosnier

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Year:

2003

Language:

english

DOI:

10.1116/1.1586276

File:

PDF, 1.07 MB

english, 2003

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