Study on the etching characteristics of amorphous carbon...

Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide

Kim, Jong Kyu, Cho, Sung Il, Kim, Nam Gun, Jhon, Myung S., Min, Kyung Suk, Kim, Chan Kyu, Yeom, Geun Young
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4780122
File:
PDF, 1.61 MB
english, 2013
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