Epitaxial Growth of Aluminum Nitride on Sapphire Using...

Japanese Journal of Applied Physics 1981 / 1 Vol. 20; Iss. 1

Epitaxial Growth of Aluminum Nitride on Sapphire Using Metalorganic Chemical Vapor Deposition

Morita, Mizuho, Uesugi, Norihiko, Isogai, Seiji, Tsubouchi, Kazuo, Mikoshiba, Nobuo
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Volume:
20
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.20.17
Date:
January, 1981
File:
PDF, 1.83 MB
1981
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