Metal-assisted chemical etching for very high aspect ratio grooves in n -type silicon wafers
Booker, Katherine, Brauers, Maureen, Crisp, Erin, Rahman, Shakir, Weber, Klaus, Stocks, Matthew, Blakers, AndrewVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/12/125026
Date:
December, 2014
File:
PDF, 781 KB
english, 2014