[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Enhancing uniformity of borderless via resistance by HDP oxide technology
Yong-Sik Jung,, Kim, C.N., Kim, J.H., Han, J.H., Seo, Y.H., Jeon, Y.J.Year:
1999
Language:
english
DOI:
10.1109/icvc.1999.820962
File:
PDF, 521 KB
english, 1999