Ge-Source Vertical Tunnel FETs Using a Novel...

Ge-Source Vertical Tunnel FETs Using a Novel Replacement-Source Integration Scheme

Rooyackers, Rita, Vandooren, Anne, Verhulst, Anne S., Walke, Amey Mahadev, Simoen, Eddy, Devriendt, Katia, Lo-Corotondo, Sabrina, Demand, Marc, Bryce, George, Loo, Roger, Hikavyy, Andriy, Vandeweyer,
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2014.2365142
Date:
December, 2014
File:
PDF, 4.18 MB
english, 2014
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