Enhancement of Cu Filling into p-Type Macro-Porous Silicon...

Enhancement of Cu Filling into p-Type Macro-Porous Silicon by Pore Wall Thinning, Oxide Deposition and Back Side Illumination

Tobail, O., Quiroga-Gonzalez, E., Carstensen, J., Foll, H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
161
Language:
english
Journal:
Journal of the Electrochemical Society
DOI:
10.1149/2.0341412jes
Date:
August, 2014
File:
PDF, 918 KB
english, 2014
Conversion to is in progress
Conversion to is failed