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Enhancement of Cu Filling into p-Type Macro-Porous Silicon by Pore Wall Thinning, Oxide Deposition and Back Side Illumination
Tobail, O., Quiroga-Gonzalez, E., Carstensen, J., Foll, H.Volume:
161
Language:
english
Journal:
Journal of the Electrochemical Society
DOI:
10.1149/2.0341412jes
Date:
August, 2014
File:
PDF, 918 KB
english, 2014