Reduced narrow-width effects in a scaled local oxidation of...

Reduced narrow-width effects in a scaled local oxidation of silicon process

Baglee, David A., Duane, M. P., Smayling, M. C.
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Volume:
63
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p85-146
Date:
June, 1985
File:
PDF, 180 KB
english, 1985
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