Range and thermal-behavior studies of Au and Bi implanted...

Physical Review B 1990 / 4 Vol. 41; Iss. 10

Range and thermal-behavior studies of Au and Bi implanted into photoresist films

Behar, M., Grande, P. L., Amaral, L., Kaschny, J. R., Zawislak, F. C., Guimares, R. B., Biersack, J. P., Fink, D.
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Volume:
41
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.41.6145
Date:
April, 1990
File:
PDF, 439 KB
english, 1990
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