Integration of AlN with molybdenum electrodes and...

Integration of AlN with molybdenum electrodes and sacrificial amorphous silicon release using XeF 2

Sharma, Jaibir, Fernando, Sanchitha, Tan, Wee Ming
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035019
Date:
March, 2014
File:
PDF, 2.51 MB
english, 2014
Conversion to is in progress
Conversion to is failed