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Integration of AlN with molybdenum electrodes and sacrificial amorphous silicon release using XeF 2
Sharma, Jaibir, Fernando, Sanchitha, Tan, Wee MingVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035019
Date:
March, 2014
File:
PDF, 2.51 MB
english, 2014