Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry
R. Ossikovski, N. Blayo, B. Drévillon, M. Firon, B. Delahaye, A. MayeuxYear:
1994
Language:
english
DOI:
10.1063/1.112081
File:
PDF, 632 KB
english, 1994