![](/img/cover-not-exists.png)
[IEEE 2012 Opto-Electronics and Communications Conference (OECC) - Busan, Korea (South) (2012.07.2-2012.07.6)] 2012 17th Opto-Electronics and Communications Conference - Small-feature-size Etching of InP/InGaAsP by inductively coupled plasma at ultra-low pressure
Li, Yongzhuo, Cui, Kaiyu, Huang, Yidong, Feng, Xue, Wang, Da, Zhang, WeiYear:
2012
Language:
english
DOI:
10.1109/oecc.2012.6276458
File:
PDF, 300 KB
english, 2012