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Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor
D. J. Trevor, N. Sadeghi, T. Nakano, J. Derouard, R. A. Gottscho, P. D. Foo, J. M. CookYear:
1990
Language:
english
DOI:
10.1063/1.103482
File:
PDF, 610 KB
english, 1990