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[IEEE International Semiconductor Device Research Symposium, 2003 - Washington, DC, USA (Dec. 10-12, 2003)] International Semiconductor Device Research Symposium, 2003 - Structure and stability of alternative gate dielectrics for Si CMOS
Stemmer, S., Yan Yang,, Youli Li,, Foran, B., Lysaghe, P.S., Gisby, J.A., Taylor, J.R., Streiffer, S.K., Fuoss, P., Seifert, S., Wenjuan Zhu,, Ma, T.P.Year:
2003
Language:
english
DOI:
10.1109/isdrs.2003.1271995
File:
PDF, 128 KB
english, 2003