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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - All-polymer optothermal-actuated MOEMS variable optical attenuator
Llobera, A., Hoxhold, B., Demming, S., Voigt, A., de Pedro, S., Waldschik, A., Cadarso, V. J., Gruetzner, G., Buttgenbach, S.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6627048
File:
PDF, 2.36 MB
english, 2013