[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Investigation of GaAs Wafer Surface Blistering by Hydrogen Implantation
Guo, Yu-lin, Zhou, Jia, Zhu, Shi-yang, Huang, Yi-pingYear:
2006
Language:
english
DOI:
10.1109/icsict.2006.306647
File:
PDF, 347 KB
english, 2006