Incorporation of nitrogen in chemical vapor deposition...

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Incorporation of nitrogen in chemical vapor deposition diamond

R. Samlenski, C. Haug, R. Brenn, C. Wild, R. Locher, P. Koidl
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Year:
1995
Language:
english
DOI:
10.1063/1.114788
File:
PDF, 317 KB
english, 1995
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