![](/img/cover-not-exists.png)
Thickness measurements of thin anodic oxides on GaAs using atomic force microscopy, profilometry, and secondary ion mass spectrometry
P. Schmuki, M. Buchanan, B. F. Mason, G. I. Sproule, M. J. GrahamYear:
1996
Language:
english
DOI:
10.1063/1.116278
File:
PDF, 416 KB
english, 1996