Stoichiometric 6H-SiC thin films deposited at low substrate...

Journal of Laser Applications 2013 Vol. 25; Iss. 5

Stoichiometric 6H-SiC thin films deposited at low substrate temperature by laser ablation

Quiñones-Galván, J. G., Arias-Cerón, J. S., de Moure-Flores, F., Hernández-Hernández, A., Guillén-Cervantes, A., Santoyo-Salazar, J., Mendoza-Alvarez, J. G., Meléndez-Lira, M.
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Volume:
25
Year:
2013
Language:
english
Journal:
Journal of Laser Applications
DOI:
10.2351/1.4821631
File:
PDF, 878 KB
english, 2013
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