Chemical equilibration of plasma-deposited amorphous silicon with thermally generated atomic hydrogen
An, Ilsin, Li, Y. M., Wronski, C. R., Collins, R. W.Volume:
48
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.48.4464
Date:
August, 1993
File:
PDF, 390 KB
english, 1993