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Determining factor of effective work function in metal/bi-layer high-k gate stack structure studied by photoemission spectroscopy
S. Toyoda, H. Kumigashira, M. Oshima, H. Sugaya, H. MoritaYear:
2012
Language:
english
DOI:
10.1063/1.3695166
File:
PDF, 1.06 MB
english, 2012