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[IEEE 2006 IEEE Conference on Emerging Technologies - Nanoelectronics - Singapore (10-13 Jan. 2006)] 2006 IEEE Conference on Emerging Technologies - Nanoelectronics - Characterization of Thin Oxide using FIB-SIMS and FIB-TEM Techniques
Ooi Thian Ngan,, McPhail, D.S., Chater, R.J., Shollock, B.A.Year:
2006
Language:
english
DOI:
10.1109/nanoel.2006.1609713
File:
PDF, 726 KB
english, 2006