[IEEE 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Suzhou, Jiangsu, China (2009.07.6-2009.07.10)] 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Using STEM with quasi-parallel illumination and an automated peak-finding routine for strain analysis at the nanometre scale
Sourty, E., Stanley, J., Freitag, B.Year:
2009
Language:
english
DOI:
10.1109/ipfa.2009.5232604
File:
PDF, 14.45 MB
english, 2009