![](/img/cover-not-exists.png)
[IEEE 2008 58th Electronic Components and Technology Conference (ECTC 2008) - Lake Buena Vista, FL, USA (2008.05.27-2008.05.30)] 2008 58th Electronic Components and Technology Conference - Parylene N as a dielectric material for through silicon vias
Majeed, Bivragh, Pham, Nga P., Tezcan, Deniz S., Beyne, EricYear:
2008
Language:
english
DOI:
10.1109/ectc.2008.4550183
File:
PDF, 822 KB
english, 2008