Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles
Kumagai, Shinya, Tomikawa, Takashi, Ogawa, Shohei, Yamashita, Ichiro, Uraoka, Yukiharu, Sasaki, MinoruVolume:
103
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4833875
File:
PDF, 1.45 MB
english, 2013