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Structural and Dielectric Properties of the BaTi 5 O 11 Thin Film Grown on the Poly-Si Substrate using RF Magnetron Sputtering
Jeong, Young-Hun, Jang, Bo-Yun, Lee, Suk-Jin, Sun, Ho-Jung, Nahm, Sahn, Lee, Woo-Sung, Yoo, Myong-Jae, Gang, Nam-Gi, Lee, Hwack-JooVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.5506
Date:
August, 2004
File:
PDF, 338 KB
english, 2004