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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems
Ng, E. J., Ahn, C. H., Yang, Y., Hong, V. A., Chiang, C.-F., Ahadi, E., Ward, M. W., Kenny, T. W.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6627294
File:
PDF, 1.74 MB
english, 2013