In situ x-ray photoelectron spectroscopy for thin film...

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In situ x-ray photoelectron spectroscopy for thin film synthesis monitoring

M. A. Kelly, M. L. Shek, P. Pianetta, T. M. Gür, M. R. Beasley
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Year:
2001
Language:
english
DOI:
10.1116/1.1374618
File:
PDF, 440 KB
english, 2001
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